Besides the publicity, superior reactivity (normally interpreted as higher sticking probability) of the reactant molecules is very important to obtain an excellent conformality in structures with a reasonable EAR. In Desk V, an summary is provided of sticking probabilities that were described for precise ALD reactants. You will find there's https://jaredwiugt.bloginder.com/24870496/5-simple-techniques-for-atomic-layer-deposition